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Title:A review of recombination coefficients of neutral oxygen atoms for various materials
Authors:ID Paul, Domen (Author)
ID Mozetič, Miran (Author)
ID Zaplotnik, Rok (Author)
ID Primc, Gregor (Author)
ID Đonlagić, Denis (Author)
ID Vesel, Alenka (Author)
Files:.pdf Paul-2023-A_Review_of_Recombination_Coefficien.pdf (10,51 MB)
MD5: D892272E72B51CF0A20940FD4311EFBE
 
URL https://www.mdpi.com/1996-1944/16/5/1774
 
Language:English
Work type:Article
Typology:1.02 - Review Article
Organization:FERI - Faculty of Electrical Engineering and Computer Science
Abstract:Relevant data on heterogeneous surface recombination of neutral oxygen atoms available in the scientific literature are reviewed and discussed for various materials. The coefficients are determined by placing the samples either in non-equilibrium oxygen plasma or its afterglow. The experimental methods used to determine the coefficients are examined and categorized into calorimetry, actinometry, NO titration, laser-induced fluorescence, and various other methods and their combinations. Some numerical models for recombination coefficient determination are also examined. Correlations are drawn between the experimental parameters and the reported coefficients. Different materials are examined and categorized according to reported recombination coefficients into catalytic, semi-catalytic, and inert materials. Measurements from the literature of the recombination coefficients for some materials are compiled and compared, along with the possible system pressure and material surface temperature dependence of the materials’ recombination coefficient. A large scattering of results reported by different authors is discussed, and possible explanations are provided.
Keywords:heterogeneous surface recombination, recombination coefficient, surface catalicity, catalytic efficiency, atom loss coefficient, oxygen, neutral atoms, plasma
Publication status:Published
Publication version:Version of Record
Submitted for review:09.01.2023
Article acceptance date:16.02.2023
Publication date:21.02.2023
Publisher:MDPI
Year of publishing:2023
Number of pages:Str. 1-50
Numbering:Letn. 16, Št. 5, št. članka 1774
PID:20.500.12556/DKUM-87687 New window
UDC:620.1/.2
ISSN on article:1996-1944
COBISS.SI-ID:142567939 New window
DOI:10.3390/ma16051774 New window
Copyright:© 2023 by the authors
Publication date in DKUM:21.03.2024
Views:300
Downloads:29
Metadata:XML DC-XML DC-RDF
Categories:Misc.
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Record is a part of a journal

Title:Materials
Shortened title:Materials
Publisher:MDPI
ISSN:1996-1944
COBISS.SI-ID:33588485 New window

Document is financed by a project

Funder:ARRS - Slovenian Research Agency
Project number:P2-0082
Name:Tankoplastne strukture in plazemsko inženirstvo površin

Funder:ARRS - Slovenian Research Agency
Project number:L2-4487
Name:Miniaturni optični-vlakenski senzorji prostih radikalov za nadzor plazemskih procesov

Licences

License:CC BY 4.0, Creative Commons Attribution 4.0 International
Link:http://creativecommons.org/licenses/by/4.0/
Description:This is the standard Creative Commons license that gives others maximum freedom to do what they want with the work as long as they credit the author.
Licensing start date:21.02.2023

Secondary language

Language:Slovenian
Keywords:heterogena površinska rekombinacija, rekombinacijski koeficient, katalitičnost površine, katalitična učinkovitost, koeficient izgube atomov, kisik, nevtralni atomi, plazma


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