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Title:Nanašanje tankih plasti po metodi curka ioniziranih skupkov, CIS
Authors:ID Cvikl, Bruno (Author)
Files:URL http://www.dlib.si/details/URN:NBN:SI:doc-0LFZLHIN
 
Language:Slovenian
Work type:Not categorized
Typology:1.01 - Original Scientific Article
Organization:FGPA - Faculty of Civil Engineering, Transportation Engineering and Architecture
Abstract:V članku je opisan postopek naparjevanja tankih plasti po metodi curka ioniziranih skupkov, ki rabi za nizkotemperaturno nanašanje in epitakso visokokvalitetnih tankih plasti.
Keywords:vakuumska tehnika, CIS, curek ioniziranih skupkov, tanke plasti
Publisher:Društvo za vakuumsko tehniko Slovenije
Year of publishing:1992
Number of pages:str. 15-20
Numbering:Vol. 29, no. 4
PID:20.500.12556/DKUM-53419 New window
UDC:539.216:539.23
ISSN on article:0351-9716
COBISS.SI-ID:4402180 New window
NUK URN:URN:SI:UM:DK:BC13DIQJ
Publication date in DKUM:10.07.2015
Views:2085
Downloads:37
Metadata:XML DC-XML DC-RDF
Categories:Misc.
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Record is a part of a journal

Title:Vakuumist
Shortened title:Vakuumist
Publisher:Društvo za vakuumsko tehniko Slovenije
ISSN:0351-9716
COBISS.SI-ID:16059650 New window

Secondary language

Language:Unknown
Title:Ionized cluster beam thin film deposition, ICB.
Abstract:The description of the method for the thermal vacuum evaporation of suitable substance, used for the low temperature deposition and epitaxy of high-qualitythin films by the ionized cluster beam method (ICB), is presented.
Keywords:vacuum techniques, ICB, ionized cluster beam, thin films


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