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Microstructure and surface topography study of nanolayered TiAlN/CrN hard coatingPeter Panjan,
Peter Gselman,
Matjaž Panjan,
Tonica Bončina,
Aljaž Drnovšek,
Mihaela Albu,
Miha Čekada,
Franc Zupanič, 2022, izvirni znanstveni članek
Opis: The microstructure and surface topography of PVD hard coatings are among the most
important properties, as they significantly determine their mechanical, tribological and other properties. In this study, we systematically analyzed the microstructure and topography of a TiAlN/CrN
nanolayer coating (NL-TiAlN/CrN), not only because such coatings possess better mechanical and
tribological properties than TiAlN and CrN monolayer coatings, mainly because the contours of the
individual layers, in the cross-sectional STEM or SEM images of such coatings, make it easier to
follow topographic and microstructural changes that occurred during its growth. We investigated
the effects of the substrate rotation modes on the microstructure and surface topography of the
NL-TiAlN/CrN coating, as well as on the periodicity of the nanolayer structure. The influence of the
substrate material and the ion etching methods were also studied, while special attention was given to
the interlayer roughness and influence of non-metallic inclusions in the steel substrates on the growth
of the coating. The topographical features of the NL-TiAlN/CrN coating surface are correlated with
the observations from the cross-sectional TEM and FIB analysis. Selected non-metallic inclusions,
covered by the NL-TiAlN/CrN coating, were prepared for SEM and STEM analyses by the focused
ion beam. The same inclusions were analyzed prior to and after deposition. We found that substrate
rotation modes substantially influence the microstructure, surface topography and periodicity of the
NL-TiAlN/CrN layer. Non-metallic inclusions in the substrates cause the formation of shallow craters
or protrusions, depending on their net removal rates during the substrate pretreatment (polishing
and ion etching), as compared to the matrix.
Ključne besede: magnetron sputtering, nanolayer hard coatings, growth defects, surface topography, interlayer roughness, non-metallic inclusion, focused ion beam (FIB), scanning electron microscopy (SEM), scanning transmission electron microscopy (STEM)
Objavljeno v DKUM: 19.03.2025; Ogledov: 0; Prenosov: 1
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